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9510 Remote Airborne Particle Counter 1.0 CFM (28.3 LPM)
The Particles Plus 9510 is a 1.0 CFM remote airborne particle counter for cleanrooms and controlled environments, monitoring 0.5 to 25.0 µm particles across six selectable channels.
The Particles Plus 9510 is a remote airborne particle counter built for continuous monitoring in cleanrooms and other controlled environments. It operates at a 1.0 CFM (28.3 LPM) flow rate and monitors particle sizes from 0.5 to 25.0 µm across six user-selectable channels.
This instrument is designed to integrate seamlessly with Particles Plus software, facility monitoring systems, and local data collection platforms. It can report data in standard cleanroom formats or as mass concentration in µg/m³, with density and refractive index corrections when required.
The 9510 uses standardized hardware and firmware shared across the Particles Plus range, helping simplify maintenance and reduce total cost of ownership. It also provides extensive remote diagnostics, internal memory for 65,000 records, and optional temperature and relative humidity probes so three critical measurements can be consolidated at one monitoring point.
- 1.0 CFM (28.3 LPM) flow rate.
- Long-life laser diode technology.
- Up to 30 user-selectable particle size channels.
- Internal critical orifice for precise airflow control.
- Remote diagnostics, 65,000-record memory, and Modbus RTU/ASCII over isolated RS-485.
- Complies with ISO 21501-4 and JIS B9921.
| Model | 9510 |
| Size range | 0.5 µm to 25 µm |
| Factory calibrated channels | 0.5 / 1.0 / 2.5 / 5.0 / 10.0 µm |
| Counting efficiency | 50% at 0.5 µm; 100% for particles > 0.75 µm per JIS |
| Concentration limit | 1,500,000 particles/ft3 at 10% coincidence per ISO 21501-4; 3,000,000 particles/ft3 at 10% as tested and validated |
| Light source | Long-life laser diode |
| Zero count | < 1 count / 5 minutes with no appreciable drift |
| Alarms | Channel alarms on raw counts, concentrations or mass; optional environmental alarms |
| Calibration | NIST traceable |
| Vacuum requirement | External vacuum > 15 in Hg (38.1 cm) |
| Simultaneous channels | 6 channels, up to 30 simultaneous data channels |
| Configuration / download | USB mini-B |
| Communication | MODBUS RTU or ASCII over isolated RS-485 |
| Exterior surface | Stainless steel |
| Dimensions | 3.59 x 1.83 x 5.01 in (9.1 x 4.6 x 12.7 cm) including probes and connectors |
| Weight | 1.08 lb (494 g) |
| Memory | 65,000 records including particle and environmental data |
| Sample time | 1 second to 99 hours |
| Power | 9 - 24 VDC (< 3.5 W) |
| Operating conditions | 41 to 104 °F (5 to 40 °C) / 20% to 95% non-condensing |
| Warranty | 2-year limited warranty, with extended and lifetime options available |